By Dr. Markus Graf, Dr. Diego Barrettino, Prof. Dr. Henry P. Baltes, Prof. Dr. Andreas Hierlemann (auth.)
This is the 1st complete booklet on microhotplate-based chemical sensor structures in CMOS-technology. It covers all features of profitable sensor prototyping: concept of transducer modelling, microelectronics layout issues, approach layout matters, and concerns regarding method and gadget microfabrication, packaging, and checking out. a number of assorted hotplates for various operation stipulations is special and a family members of metal-oxide-covered microhotplate-based microsensor platforms with expanding complexity is gifted. those structures belong to a brand new new release of chemical microsensors and symbolize examples of the winning integration of nanomaterials, microtechnology and microelectronics.
The publication presents scholars, scientists and engineers with an obtainable creation to the sector of microhotplate-based chemical sensing, with the entire priceless basic wisdom integrated. past that, it additionally presents distinct details on all vital concerns touching on advanced high-performance CMOS chemical microsensor structures; as a result it is going to even be precious to specialists already accustomed to the field.