By M. Graf, D. Barrettino, H.P. Baltes, A. Hierlemann
The 1st entire textual content on microhotplate-based chemical sensor platforms in CMOS-technology covers all facets of profitable sensor prototyping: theoretical concerns for modelling, controller- and approach layout, simulation of circuits and microsensors, layout issues, microfabrication, packaging and checking out. a complete relations of metal-oxide established microsensor platforms with expanding complexity is gifted, together with totally built-in sensor arrays. This represents one of many first examples of built-in nanomaterials, microtechnology and embedded circuitry.
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Extra info for CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS)
Therefore, an array of temperature sensors was integrated on the hotplate to assess the temperature distribution. The temperature sensors (nominal resistance of kΩ) were placed in characteristic locations on the microhotplate, which were numbered T to T . The measurement results have been compared to the corresponding values of a FEM simulation in Sect. 2, and the validity of the model for simulations of the temperature distribution has been established. Instead of a silicon island underneath the dielectric layer, a polysilicon plate can be placed in the membrane center.
3 FEM-Simulations FEMLAB™ is a MATLAB™-based ﬁnite-element program with direct access to the model equations. The static nonlinear heat conductivity mode was chosen for the simulation, in which the nonlinear coeﬃcients are implemented through polynomials representing the temperature ﬁeld. Starting with the physical layout, a geometrical model for the solver was constructed as was shown in Fig. 2 and was described in the previous section. The designs presented in the next chapter are intended to feature homogeneous temperature distribution and low stress gradients.
Additionally the hotplate had to be optimized for drop-coating with nanocrystalline tin-oxide layers. This microhotplate was cointegrated with circuitry, and the respective monolithic sensor system will be discussed in Sect. 1. The second microhotplate design is derived from this circular microhotplate. In contrast to the ﬁrst device, it does not feature a silicon island underneath the heated area, but exhibits a network of temperature sensors in order to assess the temperature distribution and homogeneity (Sect.